JPS63145332U - - Google Patents
Info
- Publication number
- JPS63145332U JPS63145332U JP3869987U JP3869987U JPS63145332U JP S63145332 U JPS63145332 U JP S63145332U JP 3869987 U JP3869987 U JP 3869987U JP 3869987 U JP3869987 U JP 3869987U JP S63145332 U JPS63145332 U JP S63145332U
- Authority
- JP
- Japan
- Prior art keywords
- recesses
- stage
- semiconductor wafer
- manufacturing apparatus
- guide groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3869987U JPS63145332U (en]) | 1987-03-16 | 1987-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3869987U JPS63145332U (en]) | 1987-03-16 | 1987-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63145332U true JPS63145332U (en]) | 1988-09-26 |
Family
ID=30851185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3869987U Pending JPS63145332U (en]) | 1987-03-16 | 1987-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63145332U (en]) |
-
1987
- 1987-03-16 JP JP3869987U patent/JPS63145332U/ja active Pending
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